A Reliable Millimeter-Wave Quadrature Interferometer

25 Feb 2020 Gilmore M. Gekelman W. Reiling K. Peebles W. A.

A simple, low-cost millimeter-wave (70 GHz) interferometer with a phase accuracy better than plus or minur 2 degrees, and a response time of 10 ns is described. The simplicity of this interferometer makes it ideal for measurement of electron densities in laboratory or semiconductor processing plasmas... (read more)

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  • INSTRUMENTATION AND DETECTORS
  • PLASMA PHYSICS