Accurate high-resolution depth profiling of magnetron sputtered transition metal alloy films containing light species: A multi-method approach

12 Jul 2019 Moro M. V. Holeňák R. Medina L. Zendejas Jansson U. Primetzhofer D.

We present an assessment of a multi-method approach based on ion beam analysis to obtain high-resolution depth profiles of the total chemical composition of complex alloy systems. As a model system we employ an alloy based on several transition metals and containing light species... (read more)

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