Functional surface ion traps on a 12-inch glass wafer for quantum applications

26 Feb 2020 Tao J Likforman J Zhao P Li H. Henner T Lim Y Seit W Guidoni Luca Tan C

We report large-scale fabrication of perfectly functional radio frequency (RF) surface ion traps on a 12-inch glass substrate with a standard CMOS-compatible backend process. Established 12-inch foundry backend process of electroplated Cu with Au finish are employed to fabricate the surface electrodes directly on the glass wafer substrate... (read more)

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  • ATOMIC PHYSICS
  • QUANTUM PHYSICS