Investigation of surface boundary conditions for continuum modeling of RF plasmas

26 Apr 2018 Wilson Althea Shotorban Babak

This work was motivated by a lacking general consensus in the exact form of the boundary conditions (BCs) required on the solid surfaces for the continuum modeling of RF plasmas. Various kinds of number and energy density BCs on solid surfaces were surveyed and how they interacted with the electric potential BC to affect the plasma was examined in two fundamental RF plasma reactor configurations... (read more)

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