Manufacture and Characterization of Graphene Membranes with Suspended Silicon Proof Masses for MEMS and NEMS Applications

16 Mar 2020 Fan Xuge Smith Anderson D. Forsberg Fredrik Wagner Stefan Schröder Stephan Akbari Sayedeh Shirin Afyouni Fischer Andreas C. Villanueva Luis Guillermo Östling Mikael Lemme Max C. Niklaus Frank

Unparalleled strength, chemical stability, ultimate surface-to-volume ratio and excellent electronic properties of graphene make it an ideal candidate as a material for membranes in micro- and nanoelectromechanical systems (MEMS and NEMS). However, the integration of graphene into MEMS or NEMS devices and suspended structures such as proof masses on graphene membranes raises several technological challenges, including collapse and rupture of the graphene... (read more)

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Categories


  • APPLIED PHYSICS
  • MESOSCALE AND NANOSCALE PHYSICS