Multi frequency matching for voltage waveform tailoring

27 Apr 2018 Schmidt Frederik Schulze Julian Johnson Erik Booth Jean-Paul Keil Douglas French David M. Trieschmann Jan Mussenbrock Thomas

Customized voltage waveforms composed of a number of frequencies and used as the excitation of radio-frequency plasmas can control various plasma parameters such as energy distribution functions, homogeneity of the ionflux or ionization dynamics. So far this technology, while being extensively studied in academia, has yet to be established in applications... (read more)

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  • PLASMA PHYSICS