Radio-frequency optomechanical characterization of a silicon nitride drum

20 Jul 2020 Pearson A. N. Khosla K. E. Mergenthaler M. Briggs G. A. D. Laird E. A. Ares N.

On-chip actuation and readout of mechanical motion is key to characterize mechanical resonators and exploit them for new applications. We capacitively couple a silicon nitride membrane to an off resonant radio-frequency cavity formed by a lumped element circuit... (read more)

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  • MESOSCALE AND NANOSCALE PHYSICS