Transmission Line Pulse (TLP) as integrative method for the investigation of ultra-fast trapping mechanisms on high-k MIM

20 Feb 2020 Merlo Luca Rossetto Isabella Cerati Lorenzo Ghidini Gabriella Milani Antonella Toia Fabrizio Piagge Rossella Di Biccari Leonardo Gevinti Eleonora Croce Giuseppe Andreini Antonio

This paper discusses the transmission line pulse (TLP) analysis, generally used for electrostatic discharge (ESD) device characterization, as high potential usable tool also for non-ESD structures. TLP technique, combined with DC and pulsed I-V characterization, is performed to study the contribution of trap states on current conduction in metal-insulator-metal (MIM) capacitors with an HfAlO stack... (read more)

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