The ion-acoustic turbulence in the skin layer of the inductively coupled plasma

28 Nov 2020  ·  V. V. Mikhailenko, V. S. Mikhailenko, H. J. Lee ·

The theory of the nonmodal ion-acoustic instability in the skin layer of the inductively coupled plasma (ICP) is developed. This instability has time dependent growth rate and is driven by the current formed in the skin layer by the accelerated motion of electrons relative to ions under the action of the ponderomotive force... It is found that the development of the ion acoustic turbulence (IAT) in the skin layer and the scattering of electrons by IAT are basic nonlinear channels of the nonlinear absorption of the RF energy in the skin layer. read more

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Plasma Physics