no code implementations • 23 Oct 2023 • Sara Sacchi, Bappaditya Dey, Iacopo Mochi, Sandip Halder, Philippe Leray
The technological advance of High Numerical Aperture Extreme Ultraviolet Lithography (High NA EUVL) has opened the gates to extensive researches on thinner photoresists (below 30nm), necessary for the industrial implementation of High NA EUVL.