no code implementations • 21 Oct 2020 • Jidun Wu, Hao Zheng, Yanfei Wang, Fengzhu Zhou, Xiaojiang Huang
Effects of radio-frequency power and driven frequency on the two-dimensional (axial and radial) distributions of electron density and temperature were experimentally investigated in low pressure capacitively coupled argon plasmas.
Plasma Physics
no code implementations • 21 Oct 2020 • Hao Zheng, Jidun Wu, Qilu Cao, Jiaojiao Zhang, Xiaojiang Huang
Compared with the dual-frequency (DF) CCPs, it is found that with the increase of IF power, the HF power can control the electron density more independently with less influence on the electron temperature.
Plasma Physics