Deep Learning based Defect classification and detection in SEM images: A Mask R-CNN approach

no code implementations • 3 Nov 2022 • Bappaditya Dey, Enrique Dehaerne, Kasem Khalil, Sandip Halder, Philippe Leray, Magdy A. Bayoumi

In this work, we have revisited and extended our previous deep learning-based defect classification and detection method towards improved defect instance segmentation in SEM images with precise extent of defect as well as generating a mask for each defect category/instance.

Defect Detection Instance Segmentation +3